Abstract
Silicon carbide film (as thick as 25 μm) was chemically vapor deposited on molybdenum in the temperature range of 1050–1300°C by reaction of hydrogen and ethyltrichlorosilane as an application of a low-Z material to fusion reactor protective plates. The films were characterized by using scanning electron microscopy, X-ray diffraction, electron microprobe analysis, and infrared absorption spectroscopy. The deposits consisted of α and β-SiC and a small amount of SiO 2. Underlayer coatings were also attempted to improve the thermal cycling behavior. The coating with a boron underlayer was successfully cycled 2100 times between 800 and 1000°C, and then 560 times between 600 and 1200°C in air under thermal cycling conditions with a heating rate of 20°C/min. Problems in applying SiC-coated molybdenum to the first wall protective plates in a fusion reactor are discussed.
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