Abstract
Silicon bridge type micro-gas sensor array was fabricated for detecting hydrogen sulfide (H 2S) and ethanol (C 2H 5OH) gases simultaneously. Anisotropic wet etching of silicon in 25 wt.% KOH solution at 80 °C and silicon reactive ion etching (RIE) were applied to achieve the bridge type sensor for low power consumption. The fabricated device size and active region are 2 mm× 2 mm and 85 μm× 75 μm, respectively. SnO 2–CuO and SnO 2–Pt thin films were deposited on bridge type micro-heater in a simple way. The sensing characteristics of the packaged micro-sensor to target gases were also investigated.
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