Abstract

Nanotechnology and BioMEMS will have a significant impact on medicine and biology in the areas of single cell detection, diagnosis and combating disease, providing specificity of drug delivery for therapy, and avoiding time consuming steps to provide faster results and solutions to the patient. Integration of biology and silicon at the micro and nano scale offers tremendous opportunities for solving important problems in biology and medicine and enables a wide range of applications in diagnostics, therapeutics, and tissue engineering. This paper reviews state of the art in silicon-based bioMEMS and bionanotechnology as well as the future challenges and opportunities. A range of silicon devices integrating micro-systems engineering with biology are discussed with focus on rapid detection of biological entities and development of point of care devices using electrical or mechanical phenomena at the micro and nano scale.

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