Silicon-Based BioFETs with 3-D Nanostructure: Easy integration, precise control of nanostructure, and a low device-to-device variation

Abstract

Biosensors enable the quantitative detection of target biomolecules in a sample. A biosensor is composed of two parts: the receptor and the transducer. The detection mechanism of biosensors is typically based on a lockand-key approach, also known as the affinity-based approach. A receptor, such as deoxyribonucleic acid or an antibody, captures the target molecules by selectively binding with them for the purpose of detection. The transducer can convert the biobinding event into a measureable signal. For example, a cantilever transduces the mass of biomolecules into a change in resonance frequency, and electrochemical sensors transduce the charge of biomolecules into a change in current. Well-developed transducers are critical for accurate and sensitive detection of biomolecules.