Abstract
The authors report the time-of-flight secondary ion mass spectrometry of Si (100)/SiO2. Both positive and negative ion spectra were obtained using a cluster ion source (Bi32+ primary ions at 50 keV). Si+ is the base peak in positive ion mode. The negative ion spectrum shows signals characteristic of the native oxide: SiO2−, SiO2H−, SiO3−, and SiO3H−.
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