Silica‐Based Oxide Systems: II . Determination of Silica‐Based, Low Flow Temperature Glasses for Electronic Application from Relations Between Glass Transition, Flow, and Liquidus Temperatures

Abstract

The relations between glass transition and flow temperatures ( and , respectively) of vitreous silica‐based oxides and the liquidus temperature of crystallized phases were reviewed and studied. Boron, phosphorus, germanium, and arsenic oxides were studied as silica doping agents. On the basis of binary phase diagrams, experimentation, and modeling, ternary and quaternary phase diagrams were computed, providing knowledge of liquidus temperatures for any composition of the materials considered. A dilatometric study on bulk samples in the three chemical systems (, and ) showed that, for a given set of constituents, and have their minimum value for compositions very close to each other. In both and mixtures, the composition giving the lowest value is proposed for very large scale integrated planarization layers and there are indications of probable low values in the system.