Abstract

Thermoelectric thin films are of great interest for self-powering Internet of Things (IoT) nodes via energy harvesting. Heusler-type Fe2 VAl attracts some attention for room-temperature thermoelectric applications. However, the large overall thermal conductivity leads to a poor performance that restricts the current investigations. Herein, we report a comprehensive study of structural, thermoelectric, and magnetic properties of Fe 2V0.9Ti 0.1 Al thin films on quartz substrate, grown by magnetron sputtering. It is found that high-temperature annealing is more effective than the long-time annealing at the low temperatures to stabilize the L2 1 type structure of Fe2 VAl, leading to a much larger Seebeck coefficient and slightly higher thermal conductivity. More importantly, the significant off-stoichiometry phenomenon, namely Fe-rich composition, contributes to n-type conduction of thin films. The picosecond time-domain thermoreflectance technique was employed to successfully measure the thin-film thermal conductivities, merely one-third of bulk material, demonstrating the effectiveness of utilizing doping and microstructuring to reduce the thermal conductivity of Fe2 VAl. Moreover, magnetic susceptibility measurements reveal that thin films are ferromagnets, while the bulk sample is characterized by paramagnetism. Our finding sheds new light on the composition-structure-property relationship of Fe2 VAl thin films for future related applications.

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