Abstract
The quality factor kappa which describes the performance of the stroboscopic SEM detection system is first defined in terms of the signal-to-noise ratio (SNR). Then the relation between the SNR and the signal processing is measured in order to determine the kappa factor of the system for the DC beam with the spectrometer uninstalled. Also measured are the effects of electron beam pulsing and the installation of the spectrometer on the SNR. It is shown that the performance of the detection system can be well described by means of the kappa factor.
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