Abstract
触媒表面基準エッチングによる単結晶SiC,GaN,ZnO表面の平滑化
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https://doi.org/10.1380/jsssj.33.334
Journal: Hyomen Kagaku | Publication Date: Jan 1, 2012 |
License type: cc-by-nc |
触媒表面基準エッチングによる単結晶SiC,GaN,ZnO表面の平滑化
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