Abstract
SiC membranes were prepared by chemical vapor infiltration (CVI) onto γ-Al2O3-coated porous α-Al2O3 tubes. Source gases of SiH2Cl2 and C2H2 diluted with hydrogen were alternatively supplied to the porous tube during heating at 800-900°C, and evacuated after the cycles through the porous tube. According to this process, SiC could be infiltrated into porous alumina. The SiC infiltration was successfully controlled by repeated cycles of the alternating gas supply. The volume of gas, permeated into the porous tube, decreased with increasing number of infiltration cycles. The SiC membrane showed hydrogen parmeances of 1×10-8mol·m-2·s-1·Pa-1 with selectivity of 3.36 over nitrogen at 350°C.
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