Abstract
A dense SiC coating was prepared by fluidized-bed chemical vapor deposition (FB-CVD) process to protect matrix graphite sphere of high temperature gas-cooled reactor fuel element from oxidation. The effect of deposition temperature, atmosphere and the formation mechanisms of the SiC coatings were analyzed. Results show that deposition temperature has a significant influence on coating composition. At lower temperature, the co-deposition of Si occurs; while the co-deposition of C occurs at higher temperature. The atmosphere also can influence the coating phase composition. When the deposition is processed at 1773 K, there appears free Si in the SiC coating with the increase of the concentration of H2 in the atmosphere. The density of the deposited coatings can reach up to 90% of the theoretical density of SiC. The research results show that FB-CVD is an ideal choice for preparing dense SiC coating on the surface of high temperature gas-cooled reactor matrix graphite spheres.
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