Abstract
This paper describes a device design, fabrication, experimental results, and mechanical strength for a multi functional device of neural behavioral analysis. The device has been fabricated with Si micro probe of 2 mum in diameter and SiO2 micro tube of 3.6 mum in outer diameter on circuit of MOSFETs, using standard IC process followed by a selective VLS growth and MEMS techniques. MOSFETs' performance on Si(lll) is 150 mV/decade of subthreshold factor and 1.2 V of threshold voltage after the fabrication process of probes and tubes. Penetration experiment into the gelatin was carried out for an application of neural recording devices.
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