Abstract

Memristor is an emerging technology aimed at implementing neuromorphic computing in hardware system. Resistive random access memory (RRAM) is a kind of memristor with excellent performance, but abrupt switching in the set process influences the efficiency of neuromorphic system. In this study, we present an interface switching memristor device based on TiN/Si/TaOx/TiN stack and CMOS compatible fabrication process to achieve gradually resistive switching both in set and reset processes. The devices show a more than 10 switching window. The related switching mechanism is discussed.

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