Si-based tunable flattop photodetector with a stepped Fabry–Perot cavity

Abstract

This paper presents the design and analysis of a Si-based tunable flattop photodetector realized by the introduction of a stepped Fabry-Perot cavity, which can be thermally tuned via applying tuning power on its tuning electrode. By using a transfer matrix method, the spectral response of the photodetector is simulated in detail, indicating a flattop line shape can be achieved with an optimum step height. A trade-off residing in this device between the free spectrum range and the ease of fabrication of step height is also revealed and analyzed. In the final design of the photodetector, 1 dB linewidth of 0.5 nm, 3 dB linewidth of 0.8 nm, 6 dB linewidth of 1.2 nm, peak quantum efficiency of 40%, tuning efficiency of 91 mW/nm are theoretically obtained. We discuss the epitaxial growth and fabrication of the photodetector in the end, exhibiting the mature technique available for this device.