SH-SAW sensor on langasite for mass detection in liquid media

Abstract

This paper presents experimental realization of shear horizontal surface acoustic wave (SH-SAW) sensor on Langasite (LGS) for mass detection in liquid media. The presence of mycotoxins in food or pesticides in water supplies can produce grave implications on human health. Sensitive and selective sensors capable of quickly detecting the level of contamination with fungal toxins growing on grains in storage, are needed. Shear horizontal surface acoustic wave (SH-SAW) devices provide an attractive platform for the design of biosensors that operate in liquid media. The paper reports on a SH-SAW delay line designed and fabricated on langasite (LGS), Euler angles (0°, 22°, 90°). The SH-SAW devices have been fabricated using the microfabrication method by lift-off lithography process to define the patterns for the IDT structures. Frequency response of device was monitored using Anritsu vector network analyzer (VNA). A test setup was implemented for the characterization of LGS SH-SAW-based sensors.