Abstract

We aim to study the short-wave infrared (SWIR), medium-wave infrared (MWIR), and long-wave infrared (LWIR) imaging ability based on optical readout bimaterial microcantilever focal plane array (FPA) uncooled infrared imaging system. First, the principle of the bimaterial microcantilever sensing and the fabrication of the microcantilever array are introduced. Second, the optical-thermal-mechanical sensing theories based on the FPA are given. Finally, an optical readout microcantilever FPA infrared imaging system is developed for SWIR, MWIR, and LWIR imaging experiments. The experimental results show that the system can acquire the clear images of the SWIR, MWIR, and LWIR targets.

Highlights

  • Multiband infrared (IR) imaging technology is a hotspot in the IR imaging field

  • We aim to study these three wavebands infrared imaging ability based on the optical readout bimaterial microcantilever focal plane array (FPA) uncooled infrared imaging system

  • This paper focused on the short-wave infrared (SWIR), medium-wave infrared (MWIR), and long-wave infrared (LWIR) imaging ability of the bimaterial microcantilever array infrared imaging system

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Summary

Introduction

Multiband infrared (IR) imaging technology is a hotspot in the IR imaging field. It has been widely used in scientific research, medical diagnostics, energy exploration, environmental monitoring and other fields, by which the target’s multiband radiation information can be acquired and the dynamic range of infrared imaging is extended effectively. Much attention has been focused on uncooled IR imaging using an optical readout bimaterial microcantilever array. In this promising technological platform, infrared radiation detection is based on the thermal mechanical deflection of individual microcantilevers owing to the absorption of infrared photons. We aim to study these three wavebands infrared imaging ability based on the optical readout bimaterial microcantilever FPA uncooled infrared imaging system. An optical readout microcantilever IR imaging system with the special designed SWIR, MWIR, LWIR through-window and lens was developed for demonstration. The experimental results show that the bimaterial microcantilever FPA responds well to the three wavebands of infrared radiation.

Principle of the Bimaterial Microcantilever FPA
Fabrication of the Bimaterial Microcantilever FPA
Thermal-Mechanical Response Theory of the Bimaterial Microcantilever
Conclusions
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