Abstract

High-performance epitaxial niobium-doped lead zirconate titanate thin films [Pb(ZrxTi1−x)0.98Nb0.02O3] with a fixed thickness were deposited on [111]-cut single-crystalline SrTiO3 substrates by a sol-gel process as a function of Zr/Ti ratio ranging from 20/80 to 80/20. An obvious shift of morphotropic phase boundary (MPB) was observed in the [111]-oriented epitaxial films. Deviating from the Zr/Ti ratio of 52/48 in bulk materials, the MPB composition in the as-deposited films was found to move to a lower Zr/Ti ratio between 30/70 and 40/60, which agrees with the theoretical analysis on the basis of lattice mismatch between films and substrates and is further confirmed by the XRD patterns and Raman spectrum as well as ferroelectric test. Furthermore, a superior remnant polarization (Pr) value among all the compositions was obtained at a Zr/Ti ratio of 30/70, indicating that the extrinsic ferroelectric polarization near the new morphotropic phase boundary will lead to outstanding dielectric and piezoelectric performance in the epitaxial PZT thin film system.

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