Abstract
The time-dependent Poisson equation has been solved in the space charge sheaths of a parallel-plate RF plasma reactor. The frequency of the applied electric field is assumed to be smaller than the ion plasma frequency. The self-bias voltage has been calculated as a function of the electrode area ratio. The calculated time-dependent sheath voltages, the sheath thicknesses and the resulting current waveforms are non-sinusoidal. The sheath voltages agree with reported measurements.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
