Abstract
In this study, we successfully demonstrated a <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$700 ~\mu \text{m}$ </tex-math></inline-formula> thick shear-force sensor with <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$60\times60$ </tex-math></inline-formula> high resolution array by introducing a combination of an originally developed pressure-sensing elastomer and a newly proposed taxel (tactile pixel) structure with four point-symmetric electrodes. When shear forces are applied to the sensor substrate in several directions by lifting a weight, four sets of resistances between the electrodes are read through low-temperature polycrystalline-silicon (LTPS) thin-film transistors (TFTs) in each taxel and clear outputs corresponding to that direction can be confirmed. Furthermore, as a result of evaluating the object recognition performance of the tactile sensor by using jigs with engraved small dimples, it was confirmed that the recognized minimum size of the shape was 1.5 mm, which suggests that the spatial resolution of this sensor is superior to the human hand perception ability. Because this sensor is ultra-thin, not bulky, and potentially applicable to flexible substrates, it is quite promising as a sensor that can be mounted on the fingertip of a robot hand with multiple functions.
Highlights
FOR many years, articulated robot arms have been utilized for a wide variety of industrial applications, such as welding processes, semiconductor wafer and LCD panel transfer, electronic parts implementation, and biomedical related processes
A flexible printed circuit (FPC) film was attached to the gate/data pad electrodes of the thin-film transistors (TFTs) substrate, and a 60 × 60 tactile sensor array was completed (Figure 3(d))
After conducting an in-depth circuit simulation with experimentally obtained pressure-sensitive elastomer and low-temperature polycrystalline-silicon (LTPS) TFT characteristics, 1Tr-1R type pressure sensors and 2Tr-4R type shear-force sensors were fabricated on a glass-based LTPS TFT backplane
Summary
FOR many years, articulated robot arms have been utilized for a wide variety of industrial applications, such as welding processes, semiconductor wafer and LCD panel transfer, electronic parts implementation, and biomedical related processes. When an object contacts the tactile sensor surface, a two-layered marker pattern inside the silicone rubber deforms This paragraph of the first footnote will contain the date on which you submitted your paper for review. Someya et al demonstrated a flexible active matrix pressure sensor with 32 × 32 sensing cells (SENCEL) by combining an organic thin-film transistor (OTFT) array on a PEN substrate and pressure-sensitive rubber [5] They reported a double-function organic-based sensor array with a pressure sensor and a thermal sensor that employs a heterojunction of p-type and n-type organic semiconductors [6]. It is a non-piezoresistive, non-capacitive, and non-optical shear-force and pressure sensor As it is an ultra-thin, highly scalable, simple structure that is potentially applicable to high-resolution and flexible sensors, it can contribute to the high-precision sensing of multitasking robots that can perform complicated tasks. Analysis using an in-depth algorithm is required to calculate the accurate applied shear-force value and direction
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