Abstract

We report that the nanostructured surface of diamondlike carbon films can be shaped so as to have a sawlike pattern with obliquely incident p-polarized femtosecond laser pulses. The nanoscale surface shape was observed as functions of incident angle, superimposed number and fluence of laser pulses and characterized with height and slope angle of the inclined surface. It is shown that the inclined shape is formed with the non-uniform spatial distribution of the local field enhanced on the nanostructured surface.

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