Shape Optimization of Cantilever-based MEMS Piezoelectric Energy Harvester for Low Frequency Applications

Abstract

The ambient vibration-based micro electromechanical systems (MEMS) piezoelectric harvester has become an important subject in most research publications. Providing a green and virtually infinite alternative power source to traditional energy sources, this harvester will significantly expand the applications of wireless sensor networks and other technologies. Using piezoelectric materials to harvest the ambient vibrations that surround a system is one method that has seen a dramatic rise in the power-harvesting applications. The simplicity associated with piezoelectric micro-generators makes them very attractive for MEMS applications in which ambient vibrations are harvested and converted into electric energy. These micro-generators can become an alternative to the battery-based solutions in the future, especially for remote systems. In this paper, we propose a model and present the simulation of a MEMS-based energy harvester under ambient vibration excitation using the COVENTORWARE2010 approaches. This E-shaped cantilever-based MEMS energy harvester that operates under ambient excitation in frequencies of 12.8, 17.1, and 21.3 Hz within a base acceleration of 1 m/s2 produces an output power of 1.0 W at 2kO load.