Abstract
The shape memory effect (SME) and magnetic shape memory effect (MSME) Fe-Pd thin film are using the film curvature method. The corresponding residual stress change due to theSME and MSME in Fe-Pd film is measuredduring thermal cycling and magnetic field changing. AFe-Pd thin film with a lateral composition gradient is deposited onto micromachined x7 cantilever beam arraysubstrate,such that each of the cantilever beams is coated with a film of different composition.There is abrupt stress change in only .1 at % Pd as the temperature of the film is cycled, and the corresponding stress change was measured as 0.16 GPa. The film with .4 at % Pd showsthe abrupt stress change at 0.7 Tesla, which means that the composition has the MSME.
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