Abstract
This paper presents the design, fabrication, and performance of shape memory alloy (SMA) microvalves with a novel plug-in interface that enable arbitrary combinations and interchange of individual valve components in order to realize customized fluidic control systems. Actuation of the valves relies on a micromachined SMA foil, which is prestrained in order to adjust for a given flow, and pressure requirement. A demonstrator system is presented consisting of up to nine microvalves, flow channels and control electronics arranged in different functional layers that are stacked onto each other. The microvalves are designed for flow rates of 12.5 ml min−1 (water) in open state at a pressure difference of 200 kPa. Flow regulation is tested in closed-loop control mode using a flow sensor with a short time constant. The accuracy of flow control is in the order of 1.5%. The response times are below 24 ms.
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