Abstract
In recent years, 3D printers have been utilized in many fields such as aviation industry, microelectromechanical systems and medicine. The size of 3D printed object is ranging from several micrometers to several meters. In particular, microstereolithography makes it possible to produce 3D micro objects whose size is less than a few centimeters. In this process, photopolymer is selectively polymerized by scanning a laser beam. To produce precise 3D micro objects, exposure conditions such as laser power and scanning speed should be optimized to reduce over exposure or under exposure. Even if the exposure conditions are optimized, shape errors of the 3D object still remain due to essential problem based on layer-by-layer process. Therefore, we have developed a 3D shape measurement system suitable for evaluating transparent 3D micro object produced by microstereolithgraphy. In experiments, we demonstrated that a micro pillar whose diameter is 50 μm could be observed by our 3D shape measurement system.
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