Abstract
We study the dynamics of void formation through the shape evolution of high-aspect-ratio cylindrical holes in Si(001) substrates under hydrogen annealing. We compare the observed evolution of these holes with numerical simulations based on the continuum theory for surface-diffusion-driven shape evolution. We find that a strong morphological instability arises near the hole opening, regardless of the presence of anisotropy in surface energy. The observed shape evolution of high-aspect-ratio holes during hydrogen annealing is understood as a surface-diffusion-driven evolution subject to the stability of the facets which form the vertical sidewall.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
