Abstract
For fast electron beam (EB) data conversion, an improved system of hierarchical process has been constructed. Several functions have been added to hierarchically perform shape data operations with increased efficiency. The added functions aim to cut redundant checks in oversizing, to reduce shape data expansion in array data handling and to speed cell overlap checks. These functions were implemented on a computer-aided design (CAD) system utilizing software tools available on it. The new system was applied to the variable shaped beam (VSB) EB data conversion and demonstrated to have better performance. A 16 Kbit SRAM design, conventionally degenerated near a flat level process, was successfully processed in a hierarchical manner, and performance gains of 1.6 to 3.1 were obtained.
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