Shadowgraph studies of laser-assisted non-thermal structuring of thin layers on flexible substrates by shock-wave-induced delamination processes

Abstract

The laser-assisted microstructuring of thin films especially for electronic applications without damaging the layers or the substrates is a challenge for the laser micromachining techniques. The laser-induced thin-film patterning by ablation of the polymer substrate at the rear side that is called ‘SWIFD’ – shock-wave-induced film delamination patterning has been demonstrated. This study focuses on the temporal sequence of processes that characterize the mechanism of this SWIFD process on a copper indium gallium selenide (CIGS) solar cell stacks on polyimide. For this purpose high-speed shadowgraph experiments were performed in a pump probe experimental set-up using a KrF excimer laser for ablating the rear side of the polyimide substrate and measuring the shock wave generation at laser ablation of the polymer substrate as well as the thin-film delamination. The morphology and size of the thin-film structures were studied by scanning electron microscopy (SEM). Furthermore, the composition after the laser treatment was analyzed by energy dispersive X-ray (EDX) spectroscopy. The shadowgraph experiments allow the time-dependent identification and evaluation of the shock wave formation, substrate bending, and delamination of the thin film in dependence on the laser parameters. These results will contribute to improve the physical understanding of the laser-induced delamination effect for thin-film patterning.