Abstract
Using a shadowed pulsed laser deposition allows us to reduce the number of droplets on the YBa2Cu3O7−x film surface obtained by pulsed laser deposition method. In this study, we present a new modification of pulsed laser deposition method: a shadowed off-axis pulsed laser deposition. The substrate surface lies in the plain defined by the laser beam. A rectangular shadow mask located between target and substrate reduce the quantity of large particles deposited from the diffusion flow. Such geometry allows us to carry out the laser plume scanning on the target surface for simultaneous one-step double-sided deposition films with a droplet-free surface. Both films had good superconducting properties.
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