Abstract
As the surface shape of a reflection mirror is different from the target shape at the end stage of the grinding process,and the profilometers and common interferometers can not measure the surface error exactly,this paper proposed a method to measure the large aperture aspheric surface by using a Shack-Hartmann Wavefront Sensor(SHWS) with a large dynamic range and high precision.The principle of the measuring system for SHWS was researched,its measuring errors were analyzed and a corresponding data processing software was compiled.Using a simulation reference file,a hyperboloid reflection mirror with a diameter of 350 mm was tested by the SHWS.Results indicate that the PV and RMS of the surface error are 0.388λ and 0.043λ,respectively(λ=632.8 nm).In order to testify the measurement result,the mirror is also measured by an interferometer with a null compensator.Comparing the two testing results,the PV and RMS of the deviation are 0.014λ and 0.001λ,respectively,which proves the feasibility of measuring large aperture aspheric surfaces by SHWSs.
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