Abstract
SF<SUB>6</SUB> gas has been used for power transformers or gas insulated switchgears, because it has the superior insulation property and the stable structure chemically. It has been, however, one of global warming gases and required to reduce the its amount. Some papers have reported that its amount could be reduced by mixing with other gases, such as N₂, CF₄, CO₂ and C₄F<SUB>8</SUB> and their mixture gases would cause the synergy effect.BR In this paper, we investigated the characteristics of DC plasmas on SF<SUB>6</SUB> mixture gases with N₂ at atmospheric pressure. N₂ gas is one of cheap gases and has been reported to show the synergy effect with mixing SF<SUB>6</SUB> gas, even though N₂ plasmas have electron-positive characteristics. 38 kinds of SF<SUB>6</SUB>/N₂ plasma particles, which consisted of an electron, two positive ions, five negative ions, 30 excitation and vibration particles, were considered in a one dimensional fluid simulation model with capacitively coupled plasma chamber.BR The results showed that the joule heating of SF<SUB>6</SUB>/N₂ plasmas was mainly caused by positive ions, on the other hand electrons acted on holding the SF<SUB>6</SUB>/N₂ plasmas stably. The joule heating was strongly generated near the electrodes, which caused the increase of neutral gas temperature within the chamber. The more N₂ mixed-ratio increased, the less joule heating was. And the power consumptions by electron and positive ions increased with the increase of N₂ mixed-ratio.
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