Abstract
Purpose – The purpose of this research is to develop a kind of new service‐driven MEMS “top‐down” design method and implement the correspondent web‐based software prototype as verification.Design/methodology/approach – Bond graphs are used as the output of conceptual design. Feature modeling technology is just a bridge to perform the feature mapping from the conceptual model to the structure and geometric model of micro‐components. To support design evaluations, a 3D whiteboard collaborative mechanism powered with networked VR service functions is put forward to visualize and operate small micro‐components in a macro world. In addition, service‐driven MEMS “top‐down” design flow is modeled as a formalized “AND/OR” graph with which the design service scheduling is finished with the priority‐in‐depth searching algorithm.Findings – Traditional MEMS CAD systems were developed on the basis of “bottom‐up” design method mainly used in laboratory practice. Different from the above, this research presents a soluti...
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