Abstract
We report the fabrication and characterization of straight and serpentine low loss trapezoidal silica waveguides integrated on a silicon substrate. The waveguide channel was defined using a dual photo-lithography and buffered HF etching and isolated from the silicon substrate using an isotropic silicon etchant. The waveguide is air-clad and thus has a core-cladding effective index contrast of approximately 25%. Measured at 658, 980 and 1550 nm, the propagation loss was found to be 0.69, 0.59, and 0.41 dB/cm respectively, with a critical bending radius less than 375 μm. The waveguide's polarization behavior was investigated both theoretically and experimentally. Additionally, the output power shows a linear response with input power up to 200 mW.
Highlights
Integrated waveguides are one of the fundamental elements of photonic circuits [1, 2]
We report the fabrication and characterization of straight and serpentine low loss trapezoidal silica waveguides integrated on a silicon substrate
The output power shows a linear response with input power up to 200mW
Summary
Integrated waveguides are one of the fundamental elements of photonic circuits [1, 2]. The two key factors of a high performance waveguide are low propagation loss and small bending radius. The refractive index contrast between the core and the cladding in silica waveguides is small (less than 1.5 percent). This restricts the bending radius to several mm, and limits achieving smaller footprints. By increasing the refractive index contrast, more compact devices are possible, enabling denser photonic circuit using silica devices [6]. Despite recent advances in the field of integrated silica photonics which leverage ultra-low loss oxides, the majority of work to date is unable to direct and confine light in arbitrary directions [11]
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