Abstract
In this paper we report the first integration of a silicon microfabricated gas chromatography column with an ion trap mass spectrometer. The MEMS-column is fabricated in all silicon materials, with an integrated platinum resistive heater and temperature sensors. This design enables low power operation and rapid temperature heating, which are both useful for temperature programmed separations. The ion trap mass spectrometer has miniaturized electronics, including a compact RF generator, miniature detector system and control electronics which form the walls of the vacuum chamber. The integrated system has been demonstrated to separate a model mixture containing chemicals from different functional groups in under 22 min, while only consuming less than 15 W of power (30 W with vacuum pump).
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