Abstract
Abstract An explicit three-dimensional calculation of c.w. modulated photothermal deflection (PTD) with obliquely crossed geometry, including optical thin film and substrate absorption, has been presented. Theoretical results show that the obliquely crossed PTD technique is feasible to separate the thin film and substrate absorption, and to measure low thin film absorption under high substrate absorption by appropriately adjusting the cross-point position of the excitation and probe beams. Measurement of the thin film absorption is not affected by the thermal properties of the substrate. The obliquely crossed PTD also provides a method for real-time monitoring of thin film generation.
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