Abstract
The optical transmission spectrum of germanosilicate glass deposited by surface plasma chemical vapor deposition on the inner surface of a quartz tube revealed interference resonances typical of multilayer dielectric coatings with alternating refractive indices. It is shown that this effect can be attributed to the longitudinal inhomogeneity of the plasma composition and specifically to an axial shift of the concentration maxima of germanium and silicon oxide. As a plasma having a nonuniform composition moves along the tube, a layer of glass is formed with a strong transverse germanium concentration gradient. It is established that in surface plasma chemical vapor deposition the axial separation of the regions of deposition of the silicon and germanium oxides increases if the glass is synthesized under conditions of oxygen deficiency.
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