Abstract
Polycrystalline SnO2 and SnO2 films were surface-doped with palladium using laser ablation. The effect of the energy density of pulsed KrF laser radiation on the plasma generation process and Pd deposition rate was studied, and the depth profiles of Pd in the films were determined. The gas response of the Pd/SnO2 , SnO2 , and Pd/SnO2 films was studied between 200 and 380°C using a mixture of 1 vol % H2 with N2 . Surface doping with Pd was found to enhance the hydrogen sensitivity of SnO2 by two orders of magnitude.
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