Sensor Packaging: New Challenges for New Applications

Abstract

Advantages of silicon-based sensors are compatibility with CMOS, improved robustness and reliability, smaller size and reflow compatibility. Biosensors that use an electrical measurement principle need electrical connections and fluidic access to the die. This only works when the electrical interconnects are kept clean of biofluid and when the package is compatible with the biofluids, receptor chemicals and other sensor elements. In addition, the package needs to be very cheap. A simple plastic overmolded package with a hole in the compound at the sensor location is an effective solution. RFID sensors also need direct die access for gass and pH sensing. They require the integration of processor, memory, clock, battery and antenna. The package format depends on the application. For checking the quality of perishables during transport or in a store, a disposable flexible tag is needed whereas for smart building sensors, a plastic module is more appropriate. For the sensor tag, a flexible substrate and flip chip bare dies are used. Direct die access is realized by an opening in the flex. Battery and antenna are printed on the flex. Automotive sensors that are used under the hood need to cope with very high operating temperatures with peak temperatures of up to 200 °C and they need to be delamination free. The critical points in the standard plastic packages used today are the molding compound and the wire-bonds. Standard packages can be used up to 150 °C. For higher temperatures, the molding compound and the wire-bond interconnect are being improved.