Abstract
Abstract. Typical 3-D topography sensors for the measurement of surface structures in the micro- and nanometre range are atomic force microscopes (AFMs), tactile stylus instruments, confocal microscopes and white-light interferometers. Each sensor shows its own transfer behaviour. In order to investigate transfer characteristics as well as systematic measurement effects, a multi-sensor measuring system is presented. With this measurement system comparative measurements using five different topography sensors are performed under identical conditions in a single set-up. In addition to the concept of the multi-sensor measuring system and an overview of the sensors used, surface profiles obtained from a fine chirp calibration standard are presented to show the difficulties of an exact reconstruction of the surface structure as well as the necessity of comparative measurements conducted with different topography sensors. Furthermore, the suitability of the AFM as reference sensor for high-precision measurements is shown by measuring the surface structure of a blank Blu-ray disc.
Highlights
The characterization of surface structures in the micro- and nanometre range can be done by various types of topography sensors
To achieve high accuracy in the determination of the transfer behaviour of a topography sensor, the profile measured by atomic force microscopes (AFMs) can be used as a reference representing the original course of the chirp structure
In the further three subsections the transfer behaviour of the tactile stylus instrument, the fibre-coupled high-speed sensor and the confocal microscope is investigated in more detail
Summary
The characterization of surface structures in the micro- and nanometre range can be done by various types of topography sensors. Doering et al (2017) present a microprobe which allows tactile roughness measurements with a lateral scanning speed of 15 mm s−1 Optical methods such as confocal microscopy, coherence scanning interferometry (CSI) and laser interferometry provide an alternative (Jordan et al, 1998; de Groot, 2015; Schulz and Lehmann, 2013). The advantage of these methods is a fast and contactless measurement of the surface topography. An advantage of comparative measurements with reference sensors in the same system configuration is the feasibility of measurement of arbitrary surface structures under identical environmental conditions. Here the priority targets were the extension of the measuring range and the coverage of metrological requirements for different measuring objects through the use of different optical and tactile sensors
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