Sensitivity of Makyoh topography

Abstract

The sensitivity of both qualitative and quantitative (grid-projection) Makyoh topography is analysed using analytic calculations. The essential difference between the two versions is pointed out. The sensitivity is defined on the analogy of the modulation transfer function and is expressed in terms of instrumental parameters and the detection limits of the imaging sensor in an analytic form. It is shown that the qualitative version is more sensitive than the quantitative one for surface features having small spatial wavelength. The effects of small-scale surface roughness and non-ideal collimation of the illumination is considered and it is shown that these effects decrease the sensitivity.