Abstract
A nonzero potential at the backside of a GaAs substrate causes errors in direct electro-optic measurements. We examine how the backside potential depends on the arrangement of the frontside conductors for digital-like structures. Ground-to-ground spacing, or conductor pitch, most strongly determines the magnitude of this electro-optic error. A single driven line in a 30 μm pitch array of grounded parallel lines on 20 mil GaAs contributes a backside potential 3% of the applied signal.
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