Abstract
The operating performance of micro-gyroscope may be easily influenced by various factors, which changes the dynamic response accordingly. Generally, the influences can’t be quantified because of the complexity, and the accurate sensitivity and linearity measuring of micro-gyroscope meets enormous difficulties. In order to accomplish corresponding measuring and analysis accurately and efficiently, input excitation waves are designed based on mathematical analysis of the measuring principles and vibration response, and each measuring of sensitivity and linearity can be analyzed in a single test. In this way, the influences from manual operation and variation of measuring environment are well eliminated, and some key parameters of the dynamic response are obtained, such as sensitive voltage, response function, linearity error, etc. In addition, problems about imbalance in double drive vibration, design of the minimum excitation voltage and evaluation of the measuring error are also described. Therefore, some important references are provided for subsequent design, experiment and engineering application.
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