Sensitivity analysis of surface topography using the submerged non uniform piezoelectric micro cantilever in liquid by considering interatomic force interaction

Abstract

The aim of this study is modeling and investigating the micro-cantilever (MC) vibration behavior of atomic force microscopy (AFM) more accurately by taking into account the simultaneous effects of the MC shear changes and it’s torsional moment in the fluid environment. The MC vibration amplitude has been investigated in various equilibrium distances under the effect of MC angle, probe length, density and viscosity of different working environments. Surfaces topography has been studied in first three natural frequencies under the non-venial fluid effect. Obtained results illustrate a considerable time delay reduction compared to the air environment, particularly in the tapping mode and higher frequencies. Efast sensitivity analysis statistical method, which is found efficient and quick, has been applied in order to analyze the geometrical parameters’ effects on the MC vibration behavior. Results indicate the low intensity of the effect exerted by the layers’ width compared to the effect of the length.