Abstract
In this paper, the sensitivity of Kelvin probe force microscopy (KPFM) is evaluated through a capacitance and cantilever beam oscillation analysis theoretically. The eigen-frequency, spring constant and quality factor of two different probes under air or ultra-high vacuum (UHV) conditions are deduced by Euler-Bernoulli beam theory, and furthermore the sensitivities of amplitude modulation (AM) and frequency modulation (FM) KPFM are calculated by noise analysis. It is found that a larger quality factor or a smaller cantilever stiffness, such as a probe with longer cantilever length working in UHV, can lead to a better sensitivity performance. Besides, in UHV the FM sensitivity is found higher than that of the AM counterpart, while in air the FM sensitivity is more dependent on the tip-sample distance.
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