Abstract
The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors.
Highlights
Graphene grown by chemical vapor deposition (CVD) is a strong candidate for realizing next-generation sensor devices[1]
It was found that a single graphene membrane with a diameter of 5 μm has too small of a responsivity (
We present few-atom-thick pressure sensors that can compete with commercial capacitive pressure sensors using arrays of nearly 10,000 doublelayer graphene (DLG) membranes
Summary
Graphene grown by chemical vapor deposition (CVD) is a strong candidate for realizing next-generation sensor devices[1]. In capacitive graphene pressure sensors, the deflection is readout by measuring the capacitance between the graphene membrane and a reference electrode[9,10,11,12]. As the pressure-induced deflection increases the mechanical stress and tension in the membrane, it can be measured using the piezoresistive effect[13,14,15] and can be probed via Resonant sensors are conceptually attractive because they potentially offer both gas sensing[19,20] and pressure sensing[2,17] functionality within a single device. In piezoresistive and Pirani sensors, it is a challenge to eliminate nonpressure-related effects of the surrounding gas on the graphene resistance. It was found that a single graphene membrane with a diameter of 5 μm has too small of a responsivity (
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