Abstract
Three thin films were prepared by PVD starting from WO3 powder with thicknesses (998.7, 1620, 2240 nm) respectively on glass substrates under limited thermal and pressure conditions, studied their I-V characteristics and calculated the sensitivity for 100 ppm of METHANOL vapor adsorption (The temperature of the films have been changed from 25°C to 350°C). A comparison among them was achieved at 300 °C as an operating degree and found that the 1620 nm WO3 has more sensitivity and has more power to adsorb for methanol vapor on it.
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