Abstract
Recently, external X-ray total reflection, or the grazing-incidence condition, is being widely used for the surface characterization in various research fields. Surface X-ray diffraction, or grazing-incidence diffraction/scattering, and total-reflection fluorescence XAFS (X-ray absorption fine structure) are typical, powerful techniques for surface characterization. X-ray fluorescence (XRF) analysis under the total-reflection condition has also been attracting much attention regarding analytical applications. Two types of XRF experiments have been carried out under the grazing-incidence condition. One is trace-element analysis of a dried solution sample or a semiconductor wafer; another is an analysis of the elemental concentration-profile in depth. Both experiments are closely related to each other, and are valuable and promising because of their non-destructive nature and the high precision of XRF analysis.
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