Abstract
OVERVIEW: As the American SIA (Semiconductor Industry Association) technology roadmap shows, semiconductor devices are moving toward higher circuit integration and density. There is also a need for device inspection equipment and systems which meet high performance requirements. Hitachi proposes a total inspection system that enables efficient operation at an appropriate investment. This inspection system includes both high sensitivity and high throughput equipment as well as analytical systems for efficient analysis of yield parameters. Yasutsugu Usami Aritoshi Sugimoto Kenji Watanabe Seiji Isogai Tetsuya Watanabe
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