Abstract

In this paper a method for the investigation of the fast SiSiO2 interface states by spectral distribution of photocapacity of the MOS system at low temperatures is presented. The method is based on the photostimulated emission of carriers from the surface into the bulk. Associated change of MOS capacity due to summing up of the charge at surface makes this method more sensitive than other optical methods. The typical photocapacity transient is discussed. For illustration, the spectral distribution of the initial rate of total capacity change is shown for the n-type MOS-C.It is suggested that the observed effects are due to photostimulated transitions from single-level states or a narrow band lying at about 0·4 eV below the conduction band edge. The lack of effects which can be attributed to the transitions from continuously distributed surface states suggests that previously observed surface states could be trapping centres located in the oxide at or near the SiSiO2 interface.

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