Abstract
A method of SEM linear measurement is proposed in which the reference marker displayed on the screen is used as a standard. The method works in a wide range of magnification without magnification calibration. Calibration of the marker against the MShPS-2.0K linear standard is described. The characteristics of the marker are investigated as functions of scanning range and declared effective marker length for the CamScan S-4 model of SEM. The maximum allowable calibration interval is determined for this SEM.
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