Abstract
Energy dispersive X‐ray spectroscopy (EDS) has been applied to thin Cr films on Fe and Fe–Ni alloys with the primary electron energy (EP) of scanning electron microscopy (SEM) as low as 1.5 keV. The detection depth of SEM‐EDS with an EP of 1.5 keV is estimated to be less than 20 nm for the L emission of Fe in Cr. Linear relationships were obtained between Fe–Ni alloy compositions determined by chemical analysis and those derived by a quantitative calculation from the Fe‐L and Ni‐L peaks measured with the EP from 1.5 to 15 keV. SEM‐EDS can be a quantitative analysis technique with high spatial resolution for material surfaces when combined with low EP's. Copyright © 2014 John Wiley & Sons, Ltd.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
